Mapper opened its MEMS factory at Technopolis Moscow on 3 July 2014, aiming to manufacture the tiny electronic-optics components used in its multi-beam, maskless lithography system. The factory was backed by a 2012 investment announcement from Rusnano; more recently, industry reporting has described the site as a 100 mm-wafer MEMS and contract-manufacturing operation under new ownership.
When did Mapper’s Russian MEMS fab open?
The Moscow factory officially opened on 3 July 2014 at Technopolis Moscow. The project followed a 2012 announcement that Rusnano would invest about €40 million (then reported as about $50 million) in Mapper. Mapper separately invested 1 billion rubles (reported as about $30 million) in the wafer fabrication plant, according to EE Times.
The figures describe the announced investment and the fab investment as reported in 2014; they should not be read as a current valuation or a complete accounting of the plant’s costs.
What did the factory plan to make?
The plant was intended to produce three classes of electronic-optics components for Mapper’s lithography technology. The 2014 reporting describes planned products and milestones, not proof that every component reached volume production.
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| Component class | Purpose or complexity | Production schedule stated in 2014 |
|---|---|---|
| Spacers | Basic structural components in the electronic-optics assembly. | Mapper said production would begin immediately, according to EE Times. |
| Silicon electronic lenses | Focus and collimate electron beams. | The report said production would begin in the second half of 2014, according to EE Times. |
| Elements with control-electrode electronics | More complex components incorporating control-electrode electronics. | The report described these as a later production stage; it did not give a dated start, according to EE Times. |
Rusnano’s reported target for the initial capacity was enough lens elements for 20 Mapper lithography machines per year. That is a machine-equivalent component target, not a stated wafer count or evidence of actual annual output.
Why did Mapper need MEMS electronic optics?
Mapper’s system divided an electron beam into many sub-beams. Those beams passed through a MEMS-based projection system, which directed them to write a digital image on photoresist. The small electronic-optics elements were therefore part of the mechanism that made the company’s multi-beam, maskless lithography approach work.
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Mapper also worked with CEA-Leti and TSMC on its technology, as reported by EE Times. The fab’s initial purpose was to supply components for Mapper’s lithography machines; that planned internal-supply role is distinct from the contract-manufacturing activity associated with the operation today.
Independent reader supportYour contribution helps us test, update, and keep practical guides available for everyone.What is the Moscow operation now?
Technopolis Moscow’s official records describe Mapper LLC as a producer of MEMS devices on 100 mm wafers and as a contract manufacturer. Its product categories include accelerometers, gyroscopes and diffraction gratings, according to the Technopolis Moscow resident listing and the Technopolis Moscow product catalog.
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A 12 September 2026 industry report says the operation has 1,500 m² of clean rooms, more than 30 pieces of equipment, about 70 specialists and capacity of up to 5,000 wafers per year. The same report says OKB Astron, part of Rostec’s Shvabe holding, has owned the operation since April 2022. These are figures and ownership details reported by 1.ru, not audited disclosures cited here.
The 2014 and 2026 capacity figures measure different things: the original target was lens elements sufficient for 20 lithography machines annually, while the later report gives a maximum wafer throughput. Neither figure by itself establishes realized production volume.
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