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Tegal sold its deep reactive ion etching (DRIE) business to SPP Process Technology Systems (SPTS) in a deal announced on February 9, 2011, and closed immediately after the agreement was signed. Tegal reported approximately $2.1 million in consideration: $1.6 million in cash and about $0.5 million in short-term liabilities assumed by SPTS. The transaction transferred named DRIE product lines and related assets, while SPTS took on existing customer contracts, including installation and warranty obligations.

What Tegal sold to SPTS

The asset purchase covered Tegal France SAS’s capital stock and operations, Tegal’s DRIE product lines, certain equipment, intellectual property and process know-how. The named systems were the Tegal 200, 110, 3200 and 4200 DRIE series. Compact and Pluto development assets were included as well. Tegal’s February 2011 transaction announcement and its SEC filing describe the deal’s scope.

The transaction followed Tegal’s 2008 acquisition of DRIE assets from Alcatel Micro Machining Systems. SPTS’s corporate history records the acquisition of Tegal’s silicon DRIE business in 2011.

How much SPTS paid

Tegal Corporation reported approximately $2.1 million in aggregate consideration in 2011. It comprised $1.6 million in cash and approximately $0.5 million in short-term liabilities assumed by SPTS. The figure is the transaction’s reported consideration, not a recurring payment or a per-system price. Tegal’s announcement gives the amount and components.

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What happened to Tegal DRIE customers

SPTS assumed existing customer contracts, including installation and warranty obligations, and committed to continued global support. This meant responsibility for those existing commitments passed with the business rather than ending when Tegal sold the assets. The announcement and transaction filing describe the contract assumption and support commitment.

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Why DRIE mattered—and why the deal was strategic

Deep reactive ion etching removes material from silicon to create deep, precise features. Tegal’s SEC filing identifies applications including three-dimensional interconnect structures and through-silicon vias, alongside manufacturing markets such as MEMS and sensors. These capabilities made DRIE relevant to advanced semiconductor packaging as well as microelectromechanical devices. Tegal’s filing describes the technology and its applications.

For Tegal, the sale was part of a strategic review of DRIE and related assets as the company changed its business model; it marked an exit from the DRIE business. For SPTS, the acquisition added silicon DRIE systems, development assets and associated know-how to a broader portfolio spanning etch, deposition and thermal processing. SPTS said the deal would enhance its DRIE portfolio, broaden its customer base and expand its ability to deliver DRIE solutions globally. SPTS’s statement in the announcement describes its rationale.

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