Choose a provider against a fab-specific, written basis of design—not a generic promise of “ultrapure” water. The evaluation should cover required water quality at defined sampling points, monitoring and excursion response, engineering and commissioning, operations, reliability and safety, wastewater and reuse, regulatory fit, lifecycle cost, expansion capacity, and results at comparable fabs. Before awarding the work, define the acceptance tests and qualification evidence required for production handover.
Start with the fab’s process-specific water requirements
There is no single UPW specification that fits every fab. Required quality depends on the manufacturing process and device linewidth, and the relevant boundary matters: a value measured at the treatment plant does not by itself establish quality at a tool’s point of use (POU). ASTM D5127-13 states that recommended purity is related to the manufacturing process and that its recommendations apply at the point of distribution. SEMI F63 provides UPW quality parameters for advanced facilities and can help establish equipment performance criteria and expectations for supplied water.
Translate process needs into a buyer-approved specification before comparing proposals. For each parameter, define the limit, measurement method, detection limit, sampling point, operating conditions, and required response to an excursion. Identify the system boundary covered by the specification, such as the treatment plant, storage, distribution loop, and tool hookup. Do not accept “ultrapure” as a measurable guarantee.
ASTM’s D5127-13 page displays the 2013 edition. Confirm the applicable edition and site requirements before relying on any numerical limits; the standard’s edition date alone does not establish that its values suit a particular process or current project.
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Use the relevant standards to define scope and evidence
These SEMI guides address different parts of the job and are intended to work together where applicable. Confirm the editions and applicability with SEMI and the fab’s engineering team when preparing the procurement documents.
| Guide | How it informs provider evaluation |
|---|---|
| SEMI F61-0521 | Frames UPW system design and operation, including treatment, distribution, tool hookup, construction, qualification, commissioning, maintenance, safety, redundancy, and high-purity materials and components. |
| SEMI F63-1224 | Provides UPW quality guidance for equipment purchasing performance criteria, operating control parameters, and supplied-water expectations. SEMI says to use it with F61 and F75. |
| SEMI F75-0521 | Covers contaminant sources, monitoring methods, sampling frequency, and sampling locations across distribution and POU. |
| SEMI F98-0326 | Supports site-specific reuse design and performance criteria, including segregation and treatment options and economic and environmental limits. |
| SEMI F116-0821 | Addresses tool-drain segregation, an enabler for reuse when water quality, the proposed application, and environmental rules permit it. |
SEMI describes F63’s purpose as “to establish performance criteria when purchasing ultrapure water (UPW) purification equipment.” Use that purchasing role to make the specification contractual: identify which criteria are guaranteed, where they apply, and how compliance will be demonstrated.
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Evaluate monitoring as a system-wide control plan
A single outlet reading cannot demonstrate stable quality throughout a fab’s UPW network. SEMI F75 addresses monitoring locations and sampling frequency; it also notes that, in critical processes, POU water quality may differ from final-filter quality because of distribution and tool conditions. Ask providers to show how their monitoring design detects changes along the entire system rather than inferring tool supply quality from the plant outlet.
- Map online analyzer locations and identify which parameters require laboratory sampling.
- Specify methods, detection limits, calibration intervals, and responsibility for instrument upkeep.
- Define warning and action limits, alarm recipients, escalation timing, and how production risk will be communicated.
- Require trend records, excursion investigation procedures, corrective-action documentation, and criteria for returning to normal operation.
Compare the full delivery and operating scope
A proposal may cover only equipment supply, or it may include design, construction, commissioning, operation, maintenance, wastewater, and reuse. SEMI F61 spans the treatment plant, distribution loop, and tool hookup and addresses construction, qualification, commissioning, maintenance, safety, and redundancy. Match those responsibilities to the actual contract boundary so that no critical interface is left unowned.
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For each provider, document who is responsible for design reviews, site construction, utility and tool interfaces, start-up, qualification, operator training, preventive maintenance, spare parts, planned outages, emergency response, and the handover package. Request references for comparable process class and scale, with capacity, operating duration, scope delivered, and permission to contact the customer. A project name or equipment list alone does not establish relevant operating performance.
Assess wastewater, reuse, and discharge as site-specific design choices
Reuse is not a standard add-on with one universally suitable scheme. SEMI F98 states: “Choice of the reuse scheme depends on the reuse water quality, application requirements, and environmental regulations.” SEMI F98 covers segregation and treatment options; SEMI F116 addresses drain segregation that can make reuse practical. Ask the provider to identify each source stream, proposed treatment, intended reuse destination, residuals handling, and discharge route, and to explain the applicable permits and local limits.
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TSMC’s 2024 Sustainability Report describes a staged reclaimed-water qualification approach: initial secondary use, pilot UPW simulation, introduction into mature fabs, and wafer trials by manufacturing process before adoption in advanced processes. The report says its wafer trials involved approximately three months of testing for each manufacturing process. This is TSMC’s reported approach, not a universal qualification duration or protocol; use it as an example of why reuse qualification should be staged and tied to process and wafer-quality evidence.
Independent reader supportYour contribution helps us test, update, and keep practical guides available for everyone.Build a weighted scorecard only after defining requirements
There is no universal provider ranking or mandatory weighting in the cited guidance. The fab owner should set weights based on process criticality, local regulation, operating model, and expansion plans. Score providers against the same evidence and assumptions, and distinguish a documented guarantee from a proposal, reference, or unverified claim.
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| Evaluation axis | Evidence to compare |
|---|---|
| Process fit and UPW quality | Process-specific limits, design basis, guaranteed performance at agreed distribution and POU boundaries, methods, detection limits, and excursion response. |
| Monitoring and control | Analyzer inventory and locations, sampling plan, action limits, escalation plan, trend records, and calibration and maintenance ownership. |
| Engineering and materials | Process-train rationale, distribution and hookup design, high-purity wetted materials, compatibility evidence, and qualification documentation. |
| Delivery and commissioning | Comparable references, design reviews, construction and commissioning plans, qualification protocol, acceptance criteria, schedule, and handover package. |
| Reliability and operations | Redundancy philosophy, maintenance windows, staffing, training, spares, outage response, and service-level commitments. |
| Reuse and wastewater | Segregated streams, reuse endpoints, treatment and discharge basis, permits and regulatory analysis, residuals handling, and water and energy balance. |
| Lifecycle economics | Comparable capital scope and assumptions for energy, chemicals, consumables, labor, waste, testing, maintenance, replacement, and feedwater changes. |
| Resilience and expansion | Feedwater variability scenarios, reserve capacity, modularity, space and utility needs, expansion assumptions and cost, and contingency arrangements. |
| Safety and compliance | Site-specific EHS requirements, chemical storage and handling, discharge compliance, commissioning controls, and emergency-response responsibilities. |
Use a common cost model and system boundary. A lower quoted capital figure is not comparable if it excludes operating labor, consumables, testing, waste disposal, maintenance, or outage exposure that another proposal includes. The available cited material does not establish a market-wide project-cost benchmark.
Put these questions in the RFP
- What exact quality limits are guaranteed, at which sampling points, and under what feedwater conditions?
- Which online instruments and laboratory methods will verify each parameter, and what are their detection limits and response times?
- How will action limits be set, excursions managed, contamination investigated, and production risk communicated?
- What system boundary does the proposal cover: pretreatment, UPW generation, storage, distribution, tool hookups, wastewater, reclaim, and discharge?
- Which process-specific references can the provider substantiate, including node or process class, scale, capacity, operating duration, and customer permission to contact?
- What redundancy, maintenance, staffing, training, spares, and emergency response are included in the operating model?
- Which waste streams will be segregated, what reuse endpoints are proposed, and what permits and discharge limits apply?
- What assumptions drive lifecycle cost, including power, chemicals, filter and resin replacement, laboratory testing, labor, waste disposal, and downtime?
- What qualification and acceptance tests must pass before the system is released for manufacturing use?
- How does the design accommodate source-water variability, future capacity growth, and changes in process-water demand?
Use case studies as questions, not benchmarks
Veolia Water Technologies’ Soitec case-study page reports a project with 70 m³/hour Grade A UPW, 58 m³/hour Grade B UPW, 154 m³/hour acid waste, and 35 m³/hour slurry/fluoride waste; it also describes future expansion capacity and a two-year operating contract. The page does not show a publication date, and these are provider-published project claims rather than independently verified performance benchmarks. Treat the figures as prompts: ask what quality boundaries and operating conditions they represent, what expansion capacity means in practice, and whether a customer reference can substantiate delivery and ongoing performance.
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