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Asyst’s 200 mm reticle SMIF pod was a sealed carrier designed to store and transport photomasks and connect with 200 mm SMIF load-port equipment for automated handling. The “200 mm” refers to the fab’s wafer-handling infrastructure, not to a 200 mm photomask: the pod was announced for 6- and 9-inch masks, while Entegris’s current comparable RSP200 is specified for one 150 mm (6-inch) reticle.
What Asyst’s 200 mm reticle SMIF pod was for
Asyst Technologies announced its reticle SMIF pod (RSP) in 2000 for mask shops and semiconductor fabs using 200 mm SMIF infrastructure. It was intended to automate the handling, transport and storage of 6- and 9-inch photomasks. In a SMIF system, a sealed carrier interfaces with equipment through a load port, reducing the need to handle a sensitive reticle manually.
The name can be confusing: 200 mm describes the equipment platform and load-port environment, not the reticle’s diameter. Asyst’s announcement described support for both 6- and 9-inch masks; the currently documented Entegris RSP200 has a different, specific capacity: one 150 mm reticle, with or without a pellicle.
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How the pod protects a photomask
A reticle carries the pattern used in lithography, so particles, static discharge, ultraviolet exposure and movement in transit are practical handling concerns. Asyst described its RSP as a sealed container intended to maintain a better-than-Class 1 cleanroom environment around the reticle and isolate it from harmful contaminants.
#1 Best Overall
- Durable Design: Crafted from high-quality, transparent plastic for long-lasting use and easy visibility of contents.
- Single Wafer Capacity: Accommodates one 12-inch silicon wafer, providing secure storage and transportation.
- Protective Features: Raised edges and secure locking mechanism help prevent wafer damage during handling.
- Compact Size: Lightweight and portable, making it convenient for lab use or transportation.
- Versatile Application: Suitable for various industries utilizing silicon wafers, such as semiconductor manufacturing.
Containment and secure positioning
The Asyst description cited improved sealing and a chamber that contacted the reticle at its edges rather than its patterned surface. That edge-to-edge support was intended to limit movement during transport without direct contact with the reticle surface. The pod was also designed with a low profile for stacking.
Static, ultraviolet and purge protection
Asyst identified improved static-dissipative materials as a protection feature. The current Entegris RSP200 product architecture adds documented UV-blocking material, metal-free construction, improved sealing conductance and an inert-gas door-purge capability. These are product-specific design features; they should not be assumed to be identical in every reticle pod.
Rank #2
- This silicon wafer holder is designed for 6 inch diameter wafers.It can prevent precision wafer or substrate from damage and contamination during shipping and storing.
- Each complete set includes three parts: container, cover and spring
- 100 class cleanliness silicon wafer box ; material: Polypropylene,
- The wafer container is packed in plastic bag
- Your purchase is backed by our exclusive 30-day free warranty - we will offer a free replacement or refund if anything goes wrong with the product.
Entegris’s 2021 published RSP200 specifications include approximately 0% UV transmissivity at wavelengths up to 470 nm and ESD performance of less than 2 seconds. The same 2021 specifications list a 1.38 kg weight, door flatness of 0.5 mm and reliability greater than 50K MCBF. Those figures describe the Entegris product as documented in 2021, not the historical Asyst pod or every RSP200 variant.
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Can an RSP load automatically onto lithography equipment?
Yes, when the carrier and tool interface are compatible. Asyst said its pod was compatible with Asyst 200 mm SMIF I/O LoadPorts, allowing automated loading onto lithography tools without manual reticle handling. That statement describes the intended Asyst system configuration; it does not establish compatibility with any arbitrary load port or current tool.
Rank #3
- This silicon wafer holder is designed for 1 inch diameter wafers.It can prevent precision wafer or substrate from damage and contamination during shipping and storing.
- Each complete set includes three parts: container, cover and spring
- 100 class cleanliness silicon wafer box ; Material: Polypropylene
- The wafer container is packed in plastic bag
- Your purchase is backed by our exclusive 30-day free warranty - we will offer a free replacement or refund if anything goes wrong with the product.
Automation can also be supplied as a separate handling system rather than built into the pod. Fortrend’s current RSP-200 automation system combines a SMIF opener with a reticle-handling robot. Its published options include reticle rotation through 0–360°, tilt through 0–300°, barcode, OCR and RFID readers, and ISO Class 1 cleanliness. These capabilities belong to that automation system and should not be attributed to Asyst’s 2000 pod.
What is the current equivalent of Asyst’s pod?
Entegris’s RSP200 is a current comparable product in the reticle-SMIF-pod category, with a standard mechanical interface for handling, storage and transport. Its manual describes capacity for one 150 mm reticle, with or without a pellicle, static and UV protection, inert-gas purge capability and optional stacking. It is a useful present-day comparison, but the available specifications do not establish that it is a drop-in replacement for every Asyst pod, 9-inch reticle configuration or legacy load port.
Rank #4
- This silicon wafer holder is designed for 2 inch diameter wafers.It can prevent precision wafer or substrate from damage and contamination during shipping and storing.
- Each complete set includes three parts: container, cover and spring
- 100 class cleanliness silicon wafer box ; Material: Polypropylene
- The wafer container is packed in plastic bag
- Your purchase is backed by our exclusive 30-day free warranty - we will offer a free replacement or refund if anything goes wrong with the product.
Entegris lists multiple dome, barcode, RFID, door and spacer variants, as well as RSP200 gasket kits and E200 replacement doors. Availability and fit should be confirmed with the supplier or distributor for the specific carrier and fab interface; these are specialist semiconductor-fab components, not ordinary consumer storage products.
Which standard covers reticle SMIF pods?
SEMI E100 covers reticle SMIF pods used to transport and store 6-inch or 230 mm reticles in reticle or IC manufacturing facilities. SEMI lists the revision as inactive, while noting that inactive standards remain available for use. Inactive does not by itself mean a fab cannot use the standard, but buyers should verify which revision and interface requirements apply to their tools and facility.
Best Value
- single wafer carrier
- 👍 Single wafer carrier for 4" or 100mm circular substrate
- 👨🎓 Good for Universities 4" fab R&D sample carrying
- 🥼 Packed in Class 100 environment
- ⚛️ Made of PP
Asyst described its 200 mm RSP as SEMI-compliant, but that broad claim alone does not identify the applicable standard revision or prove compatibility with a particular system. Confirm the required mechanical interface, reticle format and tool integration directly when evaluating a legacy pod or replacement.
Independent reader supportYour contribution helps us test, update, and keep practical guides available for everyone.What to verify before selecting a reticle pod
A pod that looks similar may not suit a fab’s reticles, contamination controls or automation. Check the following against the actual tool and handling process:
Quick Recap
- Reticle format and capacity: verify the reticle size and whether a pellicle is fitted. Do not infer capacity from “200 mm” in the product name.
- Mechanical interface: confirm SMIF load-port fit and the applicable SEMI E100 requirements or other facility specifications.
- Protection needs: compare contamination control, UV blocking and ESD performance, including the conditions and test definitions behind any published figures.
- Atmosphere and cleaning: establish whether inert-gas purge, a particular sealing performance or washability is required.
- Traceability: check support for barcode, RFID or other serialization used by the fab.
- Automation: determine whether the process needs a manual carrier, an opener/load-port interface, or a separate robot and reticle-handling system.
- Lifecycle support: confirm that compatible doors, gaskets and other service parts are available for the chosen pod and existing equipment.
Product prices and availability are accurate as of the date/time indicated and are subject to change. Any price and availability information displayed on Amazon at the time of purchase will apply.
