Free tools Windows power users keep installed
One-click scans. No signup required.
iTechGuides is reader-supported. When you buy through links on our site, we may earn an affiliate commission. As an Amazon Associate I earn from qualifying purchases. Learn more
In July 2001, Tokyo Electron (TEL) and WaferMasters announced plans to develop a 300-mm single-wafer rapid thermal furnace (SRTF) that would pair single-wafer process flexibility with the productivity of a batch furnace. The announced design was specified at less than 3.5 kW per chamber and described as using roughly one-tenth the power of then-current single-wafer rapid thermal processing (RTP) tools. WaferMasters later received exclusive rights to manufacture and sell SRTF technology after TEL left the single-wafer thermal-process business.
What TEL and WaferMasters announced in 2001
EE Times reported on July 17, 2001, that TEL and San Jose-based WaferMasters planned to co-develop a single-wafer thermal processor for 300-mm semiconductor fabs. The project was based on WaferMasters technology and was presented as a hybrid: batch-furnace-like productivity and repeatability, with the process flexibility of a single-wafer RTP tool.
A contemporaneous account of the companies’ announcement described the system as a 300-mm version of WaferMasters’ existing 200-mm SRTF platform. It gave an operating range of 200–1150 °C and said the furnace could operate at low or atmospheric pressure. The partners expected a pilot version within months and planned product shipments for 2002. Those were targets announced at the time, not confirmation that shipments later occurred.
The Tool Desk
Outbyte PC Repair FREEClear out junk files and repair common Windows errorsFree Scan →Outbyte Driver Updater FREEScan for outdated or missing drivers - takes under a minuteDriver Scan →How to interpret the low-power claim
The 2001 company release specified less than 3.5 kW per chamber at 1150 °C. EE Times characterized that as roughly one-tenth the power consumption of then-current single-wafer RTP tools. That comparison is a period-specific claim: the published account does not identify a particular competing model, test setup, or measurement method. It should not be read as a verified comparison with current equipment, nor as evidence of total fab energy use.
#1 Best Overall
- Wide Compatibility: The 111002431 furnace limit switch is compatible with Trane select gas furnaces, heat pumps, HVAC systems and other heating equipment. Compatible with Trane for T-O-D temperature control devices
- Replacement Part Number: Replace 111002431 315208 60TX11. This switch replacement part is a thermal limit switch rated at L145-60F. It automatically cuts off electricity when the temperature reaches 145°F and resumes functioning after cooling to 85°F
- Avoid Damage:The L145-60F limit switch features an auto-reset design that minimizes wear on critical furnace components by maintaining optimal working temperature. This effectively reduces overheating damage and extends the heating equipment's usage time
- Selected Materials: This 111002431 thermal limit switch employs high-precision temperature control components and a metal disc structure, enabling faster response times while meeting high-load demands and delivering stable, reliable performance
- Ease of Use: Designed for simplicity, this 111002431 thermal limit switch thermostat enables quick connection to heating equipment, restoring normal furnace function. Ensure electricity is completely disconnected before installation
The figure is chamber power, not a complete facility-power budget. It does not establish consumption by a full production line or account for associated equipment and site systems. Later WaferMasters product pages list different power figures for the named SRTF models, so the 2001 design target should not be substituted for a specification of every SRTF version.
What processes the SRTF was intended to run
The reported process window covered thermal steps used in semiconductor manufacturing and related thin-film work, rather than general-purpose heating. The announcement and later WaferMasters product descriptions list:
Rank #2
- 🔥【Extremely High Temp Range】BT-1800 Pro Laser Thermometer Gun can measures high temperature range from -58°F ~3272°F (-50 ~ 1800℃) , Accuracy +/- 3% +3 digits for -58 to 320°F; +/- 2% +2digits for 32 to 2120°F; +/- 3% +3digits for 2120 to 3272 °F
- 🔥【Stand Further From Heat 】With distance to spot ratio 50:1,, which means you can stand far from heat to measure high temperature. Instantly capture hot spot detect the internal temp of forge kiln furnace within 0.25 second only.
- 🔥【Handhled IR Thermometer】Features with MAX/MIN/Average/Difference mode and high/low temp warning. Flashing alarm once the current temp exceeds the set-point. Front flashlight+large backlit screen helps you to get the jobs done in darkness. Repeatability:1% of reading or 1℃,with adjustable emissivity 0.1 to 1.0
- 🔥【Pro Digital Pyrometer Gauge】Built with non-slip rubber handle, super handy for non-contact high temperature measuring for HVAC industrial, mechanical, smelting. Such as: metal melting furnace, forge bricks ceramic pottery,Casting
- 🔥【Durable Laser Thermometer Gun】Auto Power OFF, Low power indicator to extend the battery life. BT-1800 Professional digital infrared thermometer is specially designed for inanimate objects, temperature measurement for humans or animals could cause lower readings.optical power <0.5mW . Wavelength 630~670 um. 12 months warranty
- Barrier-metal anneal, silicidation, dopant diffusion, and implant anneal.
- Dry and wet oxidation.
- Thin-film formation, glass densification, and glass reflow.
These are application families cited for the platform. The pages do not establish that every listed process is qualified for every material, recipe, or production line.
What WaferMasters’ later product pages document
WaferMasters’ product pages, accessed in 2026, describe the SRTF-201LP and SRTF-302LP. The figures below are manufacturer-published specifications, not independent test results. The 201LP page presents its capabilities up to 1150 °C; the 302LP page lists operation up to 1100 °C.
Rank #3
- 【PRECISE TEMPERATURE CONTROL】Four-sided heating technology ensures even heat distribution inside the furnace. Temperature adjustment from 0 to 1150℃ prevents overheating or underheating. Especially suitable for heating and shaping plaster jewelry molds.
- 【LARGER INNER CHAMBER】The internal cavity measures 16 x 16 x 13.8 cm, accommodating multiple plaster molds simultaneously to meet the needs of batch processing. The overall structure is compact, with balanced capacity and ease of use. Suitable for annealing, sintering, ashing, and other high-temperature processes in ceramics, metallurgy, and scientific research laboratories.
- 【HIGH EFFICIENCY AND ENERGY SAVING】A high-performance 2000W heater with reinforced resistance wire ensures rapid heating. A unique oven door structure and sealing design effectively reduce heat loss, lower energy consumption, and improve work efficiency.
- 【INTELLIGENT DIGITAL DISPLAY】Stay in complete control with the bright, easy-to-read digital display. It offers real-time temperature monitoring and precise adjustments, making it easy to maintain optimal heating conditions.
- 【FULLY EQUIPPED】With the included accessories, heat-resistant gloves and tongs, you can get started right away. Designed for durability, the oven features strategically placed cooling vents that promote rapid heat dissipation. This intelligent cooling system ensures optimal performance and significantly extends the life of the oven.
| Published detail | SRTF-201LP | SRTF-302LP |
|---|---|---|
| Temperature capability | Up to 1150 °C | Up to 1100 °C |
| Chamber power | Less than 5 kW; temperature condition not stated on the page | Less than 10 kW at 1100 °C |
| Ramp rate | Up to 150 °C/s at 1100 °C | Up to 100 °C/s at 1100 °C |
| Uniformity and repeatability | Process uniformity below 1% (1 sigma); repeatability below 3 °C | Not stated on the page |
| Throughput | Approximately 40 wafers per hour for a 60-second process | Not stated on the page |
| Load and ambient features | Not stated on the page | Two vacuum-capable load locks, two built-in FOUP openers, and oxygen-free ambient below 30 ppm |
The 201LP page describes a resistively heated single-wafer furnace for conventional batch-furnace thermal applications and RTP applications. The 302LP page documents a 300-mm model with fab-facing wafer handling features. The pages do not, by themselves, show how many systems were installed or establish that the 2001 shipment target was met.
Independent reader supportYour contribution helps us test, update, and keep practical guides available for everyone.Who held the SRTF rights after TEL exited
In March 2005, EDN reported that TEL relinquished all SRTF intellectual-property rights to WaferMasters. WaferMasters received exclusive rights to manufacture and sell the SRTF technology and platforms. TEL said it was exiting the single-wafer thermal-process business; the companies also discussed a customer-service and support agreement for existing SRTF customers.
Rank #4
- 【Even Heating Performance for Precision Casting】Achieve perfect results with this powerful electric kiln, 2000w high-performance heating element combined with thickened heating wires rapid heating. Four-sided surround heating design helps distribute heat evenly throughout the chamber for more consistent and reliable firing results, combined with an intelligent temperature control system ranging from 0 to 1150℃, it effectively prevents overheating and uneven heating,
- 【Intuitive Digital Displayl】 Stay in complete control with the bright, easy-to-read digital display.This kiln for pottery features an intuitive digital controller with ±1℃ precision and full-range control from 0-1150℃. It ensures consistent results for enameling, sintering, ceramic glazing, and laboratory heating applications. For controlled and repeatable results
- 【Durable Small Kiln】This oven features a reinforced heating coil and sturdy inner lining for extended service life, repeatable firing cycles. The generously sized chamber (16×16×13.8cm) can heat multiple plaster molds simultaneously, making it ideal for pottery kilns for home use and small-batch production.
- 【Safe & Compact Multi-purpose Pottery Kiln for Home and Studio】 This enclosed electric kiln for safe tabletop, unique sealed oven door design effectively reduces heat loss, designed as a space-saving mini kiln, this unit handles pottery firing, glass fusing, and metal clay sintering with ease. Stove size: 16*16*13.8cm/6.3*6.3*5.4in, product size: 30*27*42cm/11.8*10.6*16.5in
- 【Versatile Usage Scenarios】Specially designed for the heating, dewaxing, and metal melting optimization of jewelry gypsum molds,this electric kiln furnace provides a stable high-temperature environment to smooth and efficient casting processes, it is an equipment for jewelry production and small hardware processing.
The available reporting establishes the rights transfer and TEL’s exit, but does not quantify the installed base or establish the scale of subsequent commercial shipments. The 2002 shipment date therefore remains an original plan, not a documented outcome in these accounts.
Do these 3 things before closing this tab:
1Clear out junk files and repair common Windows errors2Scan for outdated or missing drivers - takes under a minute3Repair Windows errors before they cause bigger problemsQuick Recap
Best Value
- Flexible safety application: furnace replacement thermostat supports diverse heating systems, providing circuit protection to fit various residential and commercial settings,thermal overload protector,Manual Reset Flame Rollout Switch
- Rapid circuit protection: furnace circuit breaker delivers to overloads, safeguarding your household and industrial devices from sudden and keeping operational safety,low temperature limit switch,Thermal Circuit Breakers
- Streamlined replacement process: circuit breaker replacement part features modular components for swap and maintenance, lowering operational complexity for furnace and fireplace management,circuit breaker,Pellet Stove Low-Temp Limit Switch
- Precise electrical control: the ciruct breakers use cuttingedge technology for exact current measurement, efficiently stopping fault currents and enhancing electrical fire prevention in your home,limit switch for furnace,furnace thermostat
- Heatresistant construction: high temp fireplace limit switch utilizes advanced heatresistant materials to thrive in challenging, hightemperature conditions found in industrial and home installations,pellet stove furnace limit switch,Furnace Replacement Thermostat
Product prices and availability are accurate as of the date/time indicated and are subject to change. Any price and availability information displayed on Amazon at the time of purchase will apply.
