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In August 2012, Russia’s state nanotechnology investment organization Rusnano committed €40 million to Mapper Lithography as part of an €80 million financing round. The Dutch company planned to use the funding to build its multi-beam electron-beam lithography systems, expand manufacturing, and establish a Russian site for lens components. Those were announced plans, not proof that the facilities or production targets were achieved. Mapper was declared bankrupt in December 2018; in January 2019, ASML announced an agreement to acquire its intellectual-property assets.

What did Rusnano fund?

EE Times reported on August 28, 2012, that Rusnano led an €80 million financing round for Mapper Lithography BV, a Delft-based developer of electron-beam lithography equipment. Rusnano contributed €40 million. The reported round also involved existing shareholders and other investors, including ADP Industries, Parcom Capital, Hoving and Partners, Technolution, and Demcon, as well as Dutch government innovation credits through AgentschapNL. EE Times’ 2012 report

The announced uses of the funds were to build and ship several Matrix systems, create manufacturing infrastructure with a planned capacity of at least 20 machines per year, and establish a Russian manufacturing site for Mapper lens components. The announcement described objectives; the reviewed reporting does not establish that the Russian site opened or that the annual capacity was reached.

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What was Mapper’s Matrix system?

Matrix was Mapper’s proposed multi-beam, maskless, direct-write electron-beam lithography platform. Rather than use a patterned mask to expose a wafer, direct-write e-beam systems use focused electron beams to write patterns. Mapper’s approach used many beams in parallel, with the aim of increasing throughput compared with writing with a single beam. The 2012 article said Mapper had worked with Taiwan Semiconductor Manufacturing Co. (TSMC) and CEA-Leti to develop the system and noted an early CEA-Leti pre-alpha system. EE Times’ 2012 technology report

The article described Matrix as capable of using up to 13,000 beams. Its specific configurations and rates were reported as follows:

Configuration described in 2012 Beam count Reported or proposed throughput Status in the report
Matrix 1.1 1,326 One wafer per hour Reported configuration and throughput
Matrix 10.1 13,260 10 wafers per hour Proposed configuration and throughput
Cluster of ten Matrix 10.1 systems (Matrix 10.10) 131,260 in total, based on ten 13,260-beam systems 100 wafers per hour Proposed clustered throughput

These figures describe configurations and performance claims reported in 2012. They do not establish that the proposed 10.1 or 10.10 systems operated at those rates in commercial production.

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What did the 2012 performance claims mean?

In the Mapper–TSMC–CEA-Leti Imagine project, the report attributed results of 22-nanometer lines, spaces, and contact holes in positive chemically amplified resist to the collaborators. It said that this density was considered sufficient for 14-nm and 10-nm logic process technologies. That statement describes the project’s reported patterning results and their intended relevance; it is not evidence that Matrix became a production tool for those process nodes.

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The article presented e-beam as a possible maskless option, including for low-volume production, and contrasted it with EUV, which it described at the time as favored for high-volume manufacturing below 20 nm. That comparison reflects the industry discussion in 2012, not a current assessment of lithography technologies or market position.

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What happened to Mapper Lithography?

ASML said Mapper was declared bankrupt on December 28, 2018. In a January 28, 2019 announcement, ASML said it had agreed to acquire Mapper’s intellectual-property assets and intended to offer suitable positions to Mapper employees in research and development and product assembly. ASML said the IP and accumulated knowledge would support further innovation in the Netherlands. ASML’s January 2019 announcement

That announcement concerns Mapper’s IP assets and proposed employee offers. It does not establish the later disposition or operating status of individual Matrix machines, nor does it confirm whether the proposed Russian lens-component facility ever operated.

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