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Particle Measuring Systems (PMS) has announced the Chem 20™ SM, a 20 nm liquid particle counter designed for inline monitoring of solvents in semiconductor manufacturing hazardous areas. PMS says the self-contained instrument is intended for liquids such as isopropyl alcohol (IPA) and propylene glycol monomethyl ether acetate (PGMEA), eliminating the need to place a conventional counter inside a customer-built nitrogen-purged enclosure. The company says the system is intended for continuous operation, with local and remote access to measurement data.

What the Chem 20 SM is

The Chem 20 SM is the hazardous-area member of PMS’s Chem 20 chemical particle-counter family. Its stated detection capability is 20 nm, and the broader Chem 20 line is presented for online and batch monitoring of high-purity and lithography chemicals. The SM model is specifically positioned for solvent service in semiconductor fabs and for chemical suppliers that need contamination measurements close to the process.

PMS says the instrument is a compact, self-contained unit for inline installation. That design is intended to move measurement to the solvent line while avoiding the space, engineering and upkeep associated with a secondary containment cabinet and nitrogen purge around a standard particle counter. Those are manufacturer claims; site engineers still need to verify that the proposed installation meets the process, chemical-compatibility and hazardous-location requirements at their facility.

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Why hazardous-area solvent monitoring is difficult

IPA, PGMEA and similar solvents can create flammable atmospheres. A conventional liquid particle counter may therefore require a custom enclosure, purge instrumentation and facility interfaces before it can be installed near the process. The enclosure must be engineered, maintained and validated along with the analyzer, which can add footprint and implementation work.

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Chem 20 SM is intended to package the hazardous-area design into the instrument itself. PMS says this can reduce enclosure complexity and maintenance and support continuous 24/7 monitoring rather than periodic sample collection. Whether it lowers total cost depends on the site’s electrical classification, solvent system, utilities, validation program and integration scope.

Published capabilities and intended applications

Item What PMS states Qualification
Minimum particle size 20 nm Value stated in the 2026 launch announcement and Chem 20 product information; independent performance data was not published.
Measurement mode Inline, continuous operation PMS describes 24/7 operation and local or remote data access.
Target liquids IPA, PGMEA and other high-purity or lithography solvents Actual compatibility should be confirmed for the solvent formulation, concentration and refractive index used at a site.
Primary users Semiconductor manufacturers and chemical suppliers Designed for process and chemical-distribution environments rather than general laboratory use.
Hazardous-area frameworks named by PMS IECEx, ATEX and NFPA 70 NEC Class I Division 2 The announcement does not publish certificate numbers, detailed ratings or installation conditions.
Public price Not stated PMS presents a contact/request-a-quote route.

How it fits into a contamination-control system

Inline monitoring

An inline counter samples the solvent stream as it is delivered or recirculated. Continuous results can help an engineering team see a contamination event sooner than a periodic bottle sample and can provide a data stream for alarms, troubleshooting and release decisions. The facility must define sample-point location, flow control, isolation, drain handling and what constitutes an actionable count.

Batch sampling

The Chem 20 family also supports batch sample-based monitoring. PMS lists the SLS-20 syringe liquid batch sampler as a related accessory for users who need discrete samples in addition to an inline installation. Batch testing can be useful for incoming chemicals, qualification work or investigations, but it does not provide the same continuous visibility as a permanently connected line.

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Data and integration

PMS describes local and remote data access. Before purchase, ask which communications protocols, user roles, alarm outputs, audit records and historian interfaces are available, and whether those functions are included in the quoted configuration. The launch material does not specify those interface details.

Certification and installation questions

PMS says Chem 20 SM will meet IECEx, ATEX and NFPA 70 NEC Class I Division 2 requirements. These frameworks address different regional or national hazardous-location schemes, so the name of a framework alone is not enough to approve an installation. Request the instrument’s certificate identifiers, equipment protection concept, gas group, temperature class, ambient limits, wiring rules and any restrictions on solvent connections.

  • Match the instrument marking to the classified area and the actual solvent hazard assessment.
  • Confirm electrical, grounding, purge, ventilation and isolation requirements with the site’s safety and facilities engineers.
  • Verify wetted-material compatibility and the permitted pressure, temperature and flow range.
  • Define calibration, cleaning, verification and service intervals before the analyzer is released for production.
  • Document how alarms, data loss and instrument faults affect chemical release or process shutdown decisions.

The announcement does not include certificate numbers, test reports or detailed installation conditions. Those documents should be obtained from PMS for the specific model and site configuration.

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What to compare before selecting a system

A meaningful comparison with another liquid-particle monitoring approach should use the same solvent and operating conditions. Check the minimum detectable size; compatibility with the solvent and its refractive index; hazardous-location certification and installation rules; inline versus batch operation; continuous data and alarm functions; enclosure and facility-integration effort; validation and service support; and total implementation cost. The available launch information contains no independent head-to-head test or public price, so a purchase decision requires a vendor quotation and application review.

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Availability and buying process

PMS presents Chem 20 SM as a specialized business-to-business instrument available through a contact or request-a-quote process rather than a standard consumer checkout. An authorized-distributor listing gives a normal shipping estimate of two to three weeks, but that is an indicative fulfillment statement, not a guaranteed lead time for every configuration or region. No public price or verified Amazon listing was identified.

When requesting a quote, provide the solvent names and concentrations, particle-size thresholds, line pressure and flow, hazardous-area classification, required data interfaces, quantity, validation documents and delivery location. Those details determine whether the quoted configuration is suitable and what additional installation work is required.

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Questions to resolve with PMS

  • What exact IECEx, ATEX and NEC Class I Division 2 certificates apply to the offered configuration?
  • Which solvent chemistries, refractive-index ranges and flow conditions are validated for 20 nm operation?
  • What are the alarm, communications and remote-access options?
  • What calibration standards, maintenance procedures and service response options are available?
  • What accessories are required for the proposed inline sample point, and can batch sampling be added later?
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Frequently Asked Questions

Can the Chem 20 SM monitor IPA or PGMEA in a hazardous area?

PMS specifically names IPA and PGMEA among the intended solvents. Confirm chemical compatibility, area classification and the exact certified configuration for your installation before ordering.

Does it still need a nitrogen-purged enclosure?

PMS says the self-contained hazardous-area design removes the need for the customer-built nitrogen-purged containment enclosure commonly used with standard counters. Site-specific installation requirements still need confirmation.

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Is the 20 nm figure an independent test result?

No independent head-to-head performance study or test report was included with the launch information. The 20 nm capability is PMS’s stated product specification.

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How much does Chem 20 SM cost?

A public price was not stated. PMS directs buyers to request a quote; an indicative distributor listing gives a normal two-to-three-week shipping estimate.

The Bottom Line

Chem 20 SM targets a specific semiconductor need: continuous 20 nm solvent-particle monitoring in hazardous areas without a separately engineered nitrogen-purged enclosure. Its practical suitability depends on documented certification, solvent compatibility, site classification and integration requirements that buyers should verify in the quotation and approval package.

Product prices and availability are accurate as of the date/time indicated and are subject to change. Any price and availability information displayed on Amazon at the time of purchase will apply.

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