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DISCO’s DFL6360 was reported in August 2002 as an automatic laser dicer for 300 mm wafer-fab applications, initially aimed at removing low-k material from dicing streets. It was a historical equipment announcement—not evidence that the DFL6360 is available today. The process it highlighted, laser grooving followed by blade dicing, addresses the risk of damaging mechanically weak low-k films during wafer separation.
What DISCO announced about the DFL6360
On 21 August 2002, EE Times reported that DISCO had announced the DFL6360, an automatic laser dicer for 300 mm fabrication applications. The machine was based on DISCO’s DFD6360 300 mm dicing-saw platform and used short-pulse laser technology. Low-k removal was its initial target application.
The announcement reported a planned December 2002 release at SEMICON Japan, with shipments expected to begin in March 2003. Those were plans stated at the time; they do not establish present-day availability. The article also relayed DISCO’s claim that the machine offered low heat damage. That is a company claim reported by the trade press, not an independently measured result.
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What low-k removal means in wafer dicing
Why low-k films need care
Low-k dielectric films insulate wiring layers in high-speed logic. DISCO says these films have low mechanical strength, making them susceptible to peeling when a blade cuts through them. Dicing streets—the planned paths between chips—therefore need preparation that limits damage to the dielectric and surrounding wiring layers.
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Laser groove, then blade separation
In low-k grooving, a laser removes the low-k-containing wiring layer along the dicing street; a blade then cuts through the wafer to separate the chips. DISCO describes this as a way to reduce chipping, delamination, and other cut-quality problems compared with cutting the fragile layers directly with a blade. These are manufacturer-described benefits, not quantified comparative results. Its low-k grooving overview outlines two process variants:
- Pi laser grooving: laser grooving followed by step-cut blade dicing.
- Omega grooving: laser grooving followed by one-pass blade dicing.
The source describes these process sequences but does not provide measurements showing one variant outperforms the other.
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How short-pulse laser grooving is intended to limit damage
DISCO’s explanation is that low-k material absorbs the laser pulses and vaporizes. The escaping vapor carries energy away from the interaction area, which the manufacturer says limits heat transfer to nearby material. DISCO characterizes this as minimizing heat damage. The available sources do not provide an independent comparison or a quantified reduction in thermal damage, so the mechanism should not be read as proof of a particular performance level.
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How the 2002 announcement relates to DISCO’s later equipment
DISCO’s later product documentation shows that 300 mm laser grooving remains an equipment application, but it does not establish that the DFL6360 is still sold or that newer machines share all of its features.
| Model | What DISCO’s documentation says | What it establishes |
|---|---|---|
| DFL6360 | Reported by EE Times in August 2002 as an automatic 300 mm laser dicer based on the DFD6360 platform, initially targeting low-k removal; planned release and shipment dates were reported at the time. | A historical announcement. Current availability is not established. |
| DFL7161 | DISCO lists a 300 mm-compatible laser saw for low-k and copper grooving. | Later product and application context; not evidence of equivalence to the DFL6360. DFL7161 product page |
| DFL7262 | DISCO describes a fully automatic laser saw for 300 mm wafers, with optional ultrashort-pulse laser optics and integrated coating, dicing, and cleaning. Listed applications include low-k wiring-layer grooving. | Later product and application context; not evidence of equivalence to the DFL6360. DFL7262 product page |
DISCO’s laser-process overview describes ablation as non-contact processing that concentrates laser energy in a small area over a short time to vaporize material. It identifies grooving as removal of surface wiring layers before blade dicing and lists low-k films among suitable materials.
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What the announcement does—and does not—show
- It records a 2002 announcement of a 300 mm automatic laser dicer, not a current product launch.
- It explains the process rationale: clear fragile low-k-containing layers from the dicing street before the blade separates the wafer.
- It reports DISCO’s claims about heat damage and cut quality, but the cited material supplies no independent trial, quantified thermal-damage reduction, throughput figure, yield result, or cost comparison.
Product prices and availability are accurate as of the date/time indicated and are subject to change. Any price and availability information displayed on Amazon at the time of purchase will apply.
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